The MSA-100-3D Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.

- Vibration measurement in real time with a high bandwidth of up to 25 MHz
- Sub-picometer amplitude resolution for both out-of-plane and in-plane movements
- Both single point and full-field measurements
- Small laser spot of less than 4 μm enables maximum lateral resolution
- Large stand-off distances of 38 mm
- Compatible with common MEMS probe stations